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Well-designed Permalloy - Tungsten Silicide – Rich

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We usually continually offer you the most conscientious consumer services, along with the widest variety of designs and styles with finest materials. These initiatives include the availability of customized designs with speed and dispatch for Al/Nb Sputtering Target , Ni Sputtering Target , Electron-Beam Melting , Since the manufacturing facility founded, we have now committed on the progress of new products. While using the social and economic pace, we are going to continue to carry forward the spirit of "high high-quality, efficiency, innovation, integrity", and persist with the operating principle of "credit to start with, customer initially, top quality excellent". We'll make a amazing long run in hair output with our companions.
Well-designed Permalloy - Tungsten Silicide – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.


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Well-run equipment, professional sales team, and better after-sales services; We are also a unified big family, everyone stick to the company value "unification, dedication, tolerance" for Well-designed Permalloy - Tungsten Silicide – Rich , The product will supply to all over the world, such as: luzern, Nepal, Bhutan, In order to carry out our goal of "customer first and mutual benefit" in the cooperation, we establish a specialist engineering team and a sales team to supply the best service to satisfy our customers' requirements. Welcome you to cooperate with us and join us. We have been your best choice.
  • Good quality and fast delivery, it's very nice. Some products have a little bit problem, but the supplier replaced timely, overall, we are satisfied.
    5 Stars By Bernice from panama - 2017.02.14 13:19
    High production efficiency and good product quality, fast delivery and completed after-sale protection, a right choice, a best choice.
    5 Stars By Anne from Guyana - 2017.06.16 18:23