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Trending Products Palladium Pd Sputtering Target - Tungsten Silicide – Rich

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Trending Products Palladium Pd Sputtering Target - Tungsten Silicide – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.


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abide by the contract", conforms to the market requirement, joins during the market competition by its superior quality also as provides extra comprehensive and exceptional service for consumers to let them turn into significant winner. The pursue of the business, is definitely the clients' gratification for Trending Products Palladium Pd Sputtering Target - Tungsten Silicide – Rich , The product will supply to all over the world, such as: panama, Borussia Dortmund, Washington, We have more than 200 staff including experienced managers, creative designers, sophisticated engineers and skilled workers. Through hard work of all employees for the past 20 years own company grew stronger and stronger. We always apply the "client first" principle. We also always fulfill all contracts to the point and therefore enjoy excellent reputation and trust among our customers. You are very welcome to personally visit our company.We hope to start a business partnership on the basis of mutual benefit and successful development . For more information please do no hesitate to contact us..
  • Company director has very rich management experience and strict attitude, sales staff are warm and cheerful, technical staff are professional and responsible,so we have no worry about product,a nice manufacturer.
    5 Stars By Freda from Ecuador - 2018.09.21 11:44
    Good quality and fast delivery, it's very nice. Some products have a little bit problem, but the supplier replaced timely, overall, we are satisfied.
    5 Stars By Mignon from Lithuania - 2017.11.12 12:31