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Low price for Aluminium Tin Copper Sputtering Target - Tungsten Silicide – Rich

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We have now a skilled, performance group to offer excellent support for our consumer. We usually follow the tenet of customer-oriented, details-focused for Cobalt Chromium Tungsten Cocrw Sputtering Target , Neodymium Nd Sputtering Target , Palladium Pd Sputtering Target , If you pursuit the Hi-quality, Hi-stable, Competitive price parts, company name is your best choice!
Low price for Aluminium Tin Copper Sputtering Target - Tungsten Silicide – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.


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With a positive and progressive attitude to customer's curiosity, our organization repeatedly improves our products top quality to meet the wants of consumers and further focuses on safety, reliability, environmental necessities, and innovation of Low price for Aluminium Tin Copper Sputtering Target - Tungsten Silicide – Rich , The product will supply to all over the world, such as: Brazil, Mombasa, Ukraine, The best and original quality for spare parts is a most important factor for transportation. We may stick on supplying original and good quality parts even a little profit earned. God will bless us to do kindness business forever.
  • The customer service staff's attitude is very sincere and the reply is timely and very detailed, this is very helpful for our deal,thank you.
    5 Stars By Clara from Hongkong - 2017.02.14 13:19
    This company has the idea of "better quality, lower processing costs, prices are more reasonable", so they have competitive product quality and price, that's the main reason we chose to cooperate.
    5 Stars By Tina from Mozambique - 2018.11.22 12:28