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Good Wholesale Vendors Preicous Metal - Tungsten Silicide Pieces – Rich

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Our mission should be to turn out to be an innovative supplier of high-tech digital and communication devices by furnishing benefit added design and style, world-class manufacturing, and repair capabilities for Iron Cobalt Feco Sputtering Target , Aluminum-Chromium Al/Cr Sputtering Targets , Sputtering Target Electronic , Our aim is to help customers realize their goals. We are making great efforts to achieve this win-win situation and sincerely welcome you to join us.
Good Wholesale Vendors Preicous Metal - Tungsten Silicide Pieces – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide pieces according to Customers’ specifications. For more information, please contact us.


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  • Sales manager is very enthusiastic and professional, gave us a great concessions and product quality is very good,thank you very much!
    5 Stars By Joa from California - 2018.08.12 12:27
    The company leader recept us warmly, through a meticulous and thorough discussion, we signed a purchase order. Hope to cooperate smoothly
    5 Stars By Jodie from Tajikistan - 2018.07.12 12:19