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Factory selling Tungsten Sputtering Target - Tungsten Silicide – Rich

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Factory selling Tungsten Sputtering Target - Tungsten Silicide – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.


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We thinks what buyers think, the urgency of urgency to act during the interests of a purchaser position of theory, allowing for much better high-quality, reduced processing costs, charges are more reasonable, won the new and outdated consumers the support and affirmation for Factory selling Tungsten Sputtering Target - Tungsten Silicide – Rich , The product will supply to all over the world, such as: Ottawa, Zambia, Mongolia, Based on our automatic production line, steady material purchase channel and quick subcontract systems have been built in mainland China to meet customer's wider and higher requirement in recent years. We have been looking forward to cooperating with more clients worldwide for common development and mutual benefit!Your trust and approval are the best reward for our efforts. Keeping honest, innovative and efficient, we sincerely expect that we can be business partners to create our brilliant future!
  • This is the first business after our company establish, products and services are very satisfying, we have a good start, we hope to cooperate continuous in the future!
    5 Stars By Marco from Angola - 2018.05.13 17:00
    The company can keep up with the changes in this industry market, product updates fast and the price is cheap, this is our second cooperation, it's good.
    5 Stars By Claire from Macedonia - 2017.11.12 12:31