China Supplier Neodymium Sputtering Target - Tungsten Silicide Pieces – Rich
China Supplier Neodymium Sputtering Target - Tungsten Silicide Pieces – Rich Detail:
Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.
Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.
Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.
ITEM | Chemical composition | |||||
Element | W | C | P | Fe | S | Si |
Content(wt%) | 76.22 | 0.01 | 0.001 | 0.12 | 0.004 | Balance |
Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide pieces according to Customers’ specifications. For more information, please contact us.
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Our items are commonly identified and trusted by people and can fulfill repeatedly altering economic and social wants of China Supplier Neodymium Sputtering Target - Tungsten Silicide Pieces – Rich , The product will supply to all over the world, such as: Chile, America, Borussia Dortmund, The company attaches great importance to product quality and service quality, based on the business philosophy "good with people, genuine to whole world, your satisfaction is our pursuit". we design products, According to customer's sample and requirements, to meet the needs of the market and offer different customers with personalized service. Our company warmly welcomes friends at home and abroad to visit, to discuss cooperation and seek common development!
By Susan from Oman - 2017.03.28 16:34
It is a very good, very rare business partners, looking forward to the next more perfect cooperation!
By Miriam from Philippines - 2017.09.28 18:29