With the development of industrial technology, the quality of targets required for industrial production is also getting higher and higher, because the quality of targets directly affects the performance of magnetron sputtering films.Nowadays, enterprises generally prefer to use high-density targets with uniform composition structure for sputtering coating when purchasing targets, so as to reduce the multiple stitching of targets and improve the quality of sputtering coatings.Therefore, this requires the manufacturer of the target to strictly control the quality of the target.Now let editor of Beijing Richmat take you to understand what factors affect the quality of the target.
1、The influence of process parameters on the quality of the target
Process parameters mainly include cold pressing pressure, pressurization speed and demolding speed and other parameters.When the target is cold pressed, the pressure will directly affect the quality of the target blank;The pressurization speed has a great impact on the stratification of the target blank, and the initial state when the powder is uniformly filled into the negative mold is a lax state, which has many pores and gases, and the discharge of gases takes a period of time.
2、The Influence of mould on target quality
The mold also has a certain influence on the forming of the target blank. The main influencing factors include the surface finish of the inner side of the mold, the gap between the punch and the mold cavity, etc. if the gap is too large, powder running and powder leakage will occur, which will make the marginal density of the blank low, and quality problems such as edge falling during demoulding.
3、The effect of material moisture content on the quality of the target
The moisture contained in the powder of the target material is equivalent to the effect of the lubricant, and its presence can reduce the friction between the particles, which is conducive to the effective transmission of cold pressing pressure, and is also conducive to smooth slippage and rearrangement between the powder particles.However, when the water content is too small or too much, it will affect the quality of the target.
When the water content in ITO powder is less than 2%, the probability of quality problems such as edge loss and delamination of the target material will be greatly increased when other conditions such as cold pressing pressure and binder content are the same.When the water content in ITO powder is more than 10%, under the same cold pressing pressure, binder content and other conditions, although the powder particles slip and rearrange more easily, water is discharged from the inside of the mold, which will cause the problem of falling edges around the blank of the target material.The results show that when the water content of powder is between 3% and 6%, the quality of the blank is effectively controlled.
4、Effect of binder content on target quality
The amount of binder incorporated has a great impact on the quality of the target material. When the amount of incorporation is less than 1%, the target blank will have a very serious quality problem, at this time, the effect of the binder is not shown, and it has little effect on improving the strength of the target blank.With the increase of binder incorporation to 2% and 3%, the strength of the target material is enhanced, and the quality problem of the target material is greatly reduced. However, when the binder is incorporated to 4%, although the quality problem of the cold-pressed blank of the target material disappears, the target material occasionally delaminates during the subsequent demolding process.
Post time: Apr-22-2022