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Notes of PVD magnetron sputtering vacuum coating

  The full name of PVD is physical vapor deposition, which is the abbreviation of English (physical vapor deposition). At present, PVD mainly includes evaporation coating, magnetron sputtering coating, multi arc ion coating, chemical vapor deposition and other forms. Generally speaking, PVD belongs to the green environmental protection industry. Compared with other industries, it has little damage to human body, but it is not without. Of course, it can be effectively reduced or even completely eliminated. On the PVD magnetron sputtering vacuum coating precautions, through the share from editor of RSM, we can more accurately understand the relevant professional knowledge.

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  Note the following points about PVD magnetron sputtering vacuum coating :

  1. Radiation: some coatings need to use RF power supply. If the power is high, it needs to be shielded. In addition, according to European standards, metal wires are embedded around the door frame of single room coating machine to shield radiation.

  2. Metal pollution: some coating materials (such as chromium, indium, aluminum) are harmful to human body, and special attention should be paid to the dust pollution during the cleaning of the vacuum chamber;

  3. Noise pollution: especially for some large coating equipment, the mechanical vacuum pump is very noisy, so the pump can be isolated outside the wall;

  4. Light pollution: in the process of ion coating, the gas ionizes and emits strong light, which is not suitable to look through the observation window for a long time;

  The general working temperature of PVD magnetron sputtering coater is controllable between 0~500!


Post time: Jul-08-2022