N'ime afọ ndị na-adịbeghị anya, na ọganihu nke nkà na ụzụ na-ejikọta ya (IC), ngwa ndị metụtara nke sekit ejikọtawo ngwa ngwa. Ultra elu ịdị ọcha aluminum alloy sputtering lekwasịrị anya, dị ka ihe na-akwado ihe na n'ichepụta nke integrated circuit metal interconnects, aghọwo a na-ekpo ọkụ isiokwu na-adịbeghị anya n'ụlọ nnyocha. onye nchịkọta akụkọ nke RSM ga-egosi anyị njirimara nke elu ịdị ọcha aluminum alloy sputtering lekwasịrị anya.
Iji nwetakwuo mma sputtering arụmọrụ nke magnetron sputtering lekwasịrị anya na hụ na àgwà nke edebewo fim, a ọnụ ọgụgụ dị ukwuu nke nnwale na-egosi na e nwere ụfọdụ chọrọ maka mejupụtara, microstructure na ọka orientation nke ultra-high ọcha aluminum alloy sputtering target.
Ogo ọka na ntụzịaka ọka nke ebumnuche nwere mmetụta dị ukwuu na nkwadebe na akụrụngwa nke ihe nkiri IC. Nsonaazụ na-egosi na ntinye ntinye na-ebelata na mmụba nke oke ọka; N'ihi na sputtering lekwasịrị na otu ihe mejupụtara, sputtering ọnụego nke lekwasịrị na obere ọka size dị ngwa ngwa karịa nke lekwasịrị na nnukwu ọka size; Ka nha ọka nke ebumnuche ahụ na-edowe anya, otú ahụ ka oke nkesa nke ihe nkiri ndị a na-edobere bụ otu.
N'okpuru otu sputtering ngwa na usoro parameters, sputtering ọnụego nke Al Cu alloy lekwasịrị anya na-abawanye na atomiki njupụta, ma ọ na-adịkarị kwụsiri ike na nso. Mmetụta nke nha ọka na ọnụego sputtering bụ n'ihi mgbanwe nke njupụta atomic na mgbanwe nke ọka; Ntuzi ọka nke Al Cu alloy lekwasịrị anya na-emetụta ọnụego ntinye ego. Dabere n'ịhụ na nha (200) ụgbọ elu kristal, mmụba nke nha nke (111), (220) na (311) ụgbọ elu kristal ga-abawanye ọnụego ntinye ego.
The ọka size na ọka nghazi nke ultra-high ịdị ọcha aluminum alloy lekwasịrị anya na-tumadi gbanwee ma na-achịkwa ingot homogenization, na-ekpo ọkụ na-arụ ọrụ na recrystallization annealing. Site na mmepe nke nha wafer na 20.32cm (8in) na 30.48cm (12in), nha ebumnuche na-abawanye, nke na-ebute ihe ndị dị elu chọrọ maka ebumnuche ịgbapụta aluminom alloy dị ọcha. Iji hụ na ihe nkiri dị mma na mkpụrụ, a ga-achịkwarịrị usoro nhazi ebumnuche iji mee ka microstructure lekwasịrị anya na nhazi ọka ga-enwerịrị textures siri ike (200) na (220).
Oge nzipu: Jun-30-2022