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What is the knowledge about alloy target storage and maintenance

  The target is packed in a double vacuum plastic bag. We advocate that users store the target, whether metal or ceramic, in vacuum packaging, especially the bonding target needs to be stored in vacuum to avoid the bonding layer oxidation affecting the bonding quality.As for the packaging of metal targets, we insist that the minimum requirement is to pack them in clean plastic bags. Below Beijing Richmat author to share with you about what are the alloy target storage and maintenance skills

https://www.rsmtarget.com/

  Maintenance skills about alloy target are as follows:

  In order to avoid short circuit and arc due to unclean cavity in the sputtering process, it is necessary to remove the sputtering track center and both sides of the accumulation of sputtering, which also helps users to continue to the maximum power density of sputtering.

  Step 1: Clean with a fleece free cloth soaked in acetone;

  Step 2: Clean with alcohol similar to step 1;

  Step 3: Wash with deionized water. After cleaning with deionized water, the target is placed in an oven to dry at 100 degrees Celsius for 30 minutes. Oxide and ceramic targets are cleaned with “flannelless cloth”.

  Step 4: after removing the dusty area, argon with high pressure and low moisture gas is used to flush the target to remove all impurity particles that may form arcs in the sputtering system.


Post time: Jun-07-2022