The purpose of target cleaning is to remove the possible dust or dirt on the surface of the target. Now, the editor of Rich Special Material Co., LTD.(RSM) will share with you about the four steps to clean metal targets:
The first step is to clean with a lint free soft cloth soaked in acetone;
The second step is similar to the first step, cleaning with alcohol;
Step 3: clean with deionized water. After being washed with deionized water, the target is placed in an oven and dried at 100 ℃ for 30 minutes. The oxide and ceramic targets should be cleaned with “lint free cloth”.
The fourth step is to wash the target with argon with high pressure and low water gas to remove all impurity particles that may form an arc in the sputtering system.
Note: when handling the target, please wear clean and lint free maintenance gloves to absolutely prevent direct contact with the target by hand.
Post time: Jun-24-2022