Lataliyaha farsamada ee RSM ayaa kula wadaagi doona faa'iidooyinka cylindrical iyo planar magnetron sputtering targets? Marka la barbardhigo bartilmaameedyada kale ee magnetron-ka, bartilmaameedyada cylindrical iyo planar magnetron sputtering waxay sii hayaan faa'iidooyinka isku mid ahaanshaha daahan wanaagsan ee bartilmaameedyada leydiga ah, waxayna sare u qaadi karaan isticmaalka bartilmaameedyada iyada oo loo marayo labada siyaabood ee soo socda:
(1) Marka labada kooxood (afar) ee godad annular ah oogada sare ee bartilmaameedku ay gaadhaan qoto dheer, xudunta bartilmaameedka (qaybta magnet) waxaa loo rogi karaa 45 ° marka loo eego tuubada bartilmaameedka, si meelaha kale ee tuubada bartilmaameedka kuwa aan daxalka ahayn waa la isticmaali karaa;
(2) Marka xudunta bartilmaameedka ah ee bartilmaameedka cylindrical iyo planar magnetron sputtering waxaa loogu talagalay sidii xudunta wareega wareega (xuddunta bartilmaameedku waa wareegeysa inta lagu jiro sputtering), dusha bartilmaameedka si siman ayaa loo tusin karaa lakabka iyada oo aan godad lahayn. Waqtigan xaadirka ah, bartilmaameedka ayaa loo isticmaali doonaa si wax ku ool ah, iyo heerka ka faa'iidaysiga bartilmaameedku wuxuu gaari karaa 50% ~ 60% Marka walxaha bartilmaameedku yahay birta qaaliga ah, tani waxay si cad u leedahay muhiimad weyn.
Iyadoo la adeegsanayo mabda'a magnetka leh kabaha cirifka ee coaxial cylindrical magnetron sputtering target si loo xalliyo dhibaatada dhamaadka magnetic field, bartilmaameedka diyaaradda leydi-geeska ah waxaa loo bedeli karaa bartilmaameed cylindrical iyo planar magnetron sputtering, bartilmaameedku wuxuu kordhin karaa heerka isticmaalka ee bartilmaameedka. iyadoo la ilaalinayo lebbiska dahaarka wanaagsan ee bartilmaameedka diyaaradda leydi-geeska ah Si loo hagaajiyo faa'iidooyinka dhaqaale.
Waqtiga boostada: Jul-04-2022